Error analysis of ellipsoidal mirrors for soft X-ray focusing by wave-optical simulation

摘要

The ellipsoidal mirror is an ideal soft X-ray focusing optic that enables achromatic and highly efficient focusing to a nanometer spot size; however, a high-quality surface is necessary for ideal focusing. Knowledge of the required figure accuracy is important for fabrication. In this paper, we analyze the effects of figure errors on the focusing performance through wave-optical calculations based on the Fresnel-Kirchhoff diffraction theory, assuming coherent soft X-rays. Figure errors are classified into three types from the viewpoint of manufacturing. The effect of the alignment error is also investigated. The analytical results quantitatively indicate criteria regarding figure accuracy, which are expected to be essential for the development of high-performance ellipsoidal soft X-ray focusing mirrors.