Formation of ceramic micro-channel by combination of laser beam machining and micro powder imprinting

摘要

Microchannels made of polymers are commonly used for MEMS and micro-total analysis system (mu TAS) devices. If a micro-channel structure can be constructed of a more stable material, the analysis of more reactant chemicals in harsher environments can be realized. In this research, we developed a process for fabricating a ceramic sheet with micro-channels. The developed process is based on powder metallurgy process. A compound material, a mixture of ceramic powder and polymer, was prepared as the sheet material. We employed laser machining to machine the sacrificial layer to form micro-channels inside the sheet. We also employed imprinting to form a structure with surface patterns and microchannels curving along with it. After the imprinted sheet was debound and sintered by heating, a ceramic sheet with micro-surface patterns and microchannels was obtained. (C) 2015 The Japan Society of Applied Physics