微通道散热器长直微通道的新加工工艺研究

摘要

微通道散热器的加工是微通道散热器的核心问题之一,越来越受到广泛的关注.目前,研究人员在加工长度1000～5000 um、宽度5～500 um范围内,可以达到加工的要求,而长度大于此范围的加工工艺实现比较困难.针对此问题,本文采用数控电火花线切割方法,通过研究线电极补偿、脉宽、脉冲间隔等主要加工参数对微通道成型尺寸的影响,通过实验对比分析确定合理的加工参数以及稳定的加工条件.结果表明,加工长度为94 000 um的微通道,在线电极参数为0.77 um,脉冲宽度为28 us,间隔为9 us的前提下,所得到的微通道的宽度在250～280 um范围内.%Processing of microchannel heat sink is one of the core problems of heat sinks.Currently,when processing microchannel heat sink,1 000～5 000 um in length and 5～100 um in width,reseachers can achieve the required processing,as for the processing of micro mechanical bigger in range,there have been no reports concerned.Considering this.According to the influence of the line electrode compensation,pulse width pulse gap parameters on the dimension precision processing,this paper presents Wire electrical discharge machining to solve microchannel processing,and analysis the influence of reasonable set of processing parameters and the stability of the processing.As is shown the processing of micro-channel 94 000 m in length,in the following parameters,the wire electrode parameters： 0.77 m,pulse width： 28,gap：9will result in a microchannel 250～280 um in width.