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A spatial rule adaptation procedure for reliable production control in a wafer fabrication system

机译:用于晶圆制造系统中可靠生产控制的空间规则调整程序

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摘要

In conventional approaches to scheduling problems, a single dispatching rule was applied to the all machines in a manufacturing system. However, since the con- dition of a machine generally differs from those of other machines in the context of overall system operation, it is reasonable to identify a suitable dispatching rule for each machine. This study proposes an adaptive procedure which produces a reliable dispatching rule for each machine. The dispatching rule consists of several criteria of which weights are adaptively determined by learning through repeated runs of simulation. A Taguchi experimental design for the simulation is used to find effective criteria weights with efficiency and robustness. For evaluation, the proposed method was applied to a scheduling problem in a semiconductor wafer fabrication system. The method resulted in reliable performances compared with those of traditional dispatching rules.
机译:在用于调度问题的常规方法中,将单个调度规则应用于制造系统中的所有机器。但是,由于在整个系统操作的环境中,一台机器的状况通常与其他机器的状况不同,因此为每台机器确定合适的调度规则是合理的。这项研究提出了一种自适应程序,该程序为每台机器产生可靠的调度规则。调度规则由几个准则组成,这些准则的权重是通过反复运行模拟学习来自适应确定的。 Taguchi的模拟实验设计用于找到具有效率和鲁棒性的有效标准权重。为了进行评估,将所提出的方法应用于半导体晶片制造系统中的调度问题。与传统的调度规则相比,该方法具有可靠的性能。

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