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A dynamic WIP control strategy for bottlenecks in a wafer fabrication system

机译:晶圆制造系统中瓶颈的动态WIP控制策略

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摘要

The performance of a wafer fabrication system is constrained by its bottlenecks, which are difficult to detect and improve due to the complexity within the system. To weaken the negative effects of bottlenecks, a work in process (WIP) strategy is proposed in this paper which focuses on offline target WIP level setting and online WIP control simultaneously. First, bottlenecks are detected and classified based on the constraint weights which are decided by the sensitivity of the system performance to the machine's fluctuant availability. Second, the target WIP level is allocated to the bottlenecks to avoid the process fluctuation caused by unpredictable events. Third, in real time scheduling, the upstream machine of the bottlenecks modifies its dispatching order to adjust the deviation of the WIP levels at the bottlenecks. Finally, a simulation platform is developed to validate the effectiveness of the proposed method.
机译:晶圆制造系统的性能受到其瓶颈的限制,由于系统内部的复杂性,瓶颈难以检测和改善。为了减轻瓶颈的负面影响,本文提出了一种在制品(WIP)策略,该策略同时关注离线目标WIP级别设置和在线WIP控制。首先,根据约束权重检测瓶颈并对其进行分类,约束权重由系统性能对机器波动可用性的敏感性决定。其次,将目标WIP级别分配给瓶颈,以避免由不可预测的事件引起的过程波动。第三,在实时调度中,瓶颈的上游计算机会修改其调度顺序,以调整瓶颈处WIP级别的偏差。最后,开发了一个仿真平台来验证所提方法的有效性。

著录项

  • 来源
    《International Journal of Production Research》 |2010年第18期|P.5221-5233|共13页
  • 作者单位

    Department of Industrial Engineering and Logistics Management, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, 200240 People's Republic of China;

    rnDepartment of Industrial Engineering and Logistics Management, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, 200240 People's Republic of China;

    rnDepartment of Industrial Engineering and Logistics Management, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, 200240 People's Republic of China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    bottleneck; constraint weight; WIP control; semiconductor wafer fabrication system (SWFS);

    机译:瓶颈;约束权重在制品控制;半导体晶圆制造系统(SWFS);

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