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Quality and exposure control in semiconductor manufacturing. Part I: Modelling

机译:半导体制造中的质量和曝光控制。第一部分:建模

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The purpose of this paper is to present a heuristic algorithm for quality control planning from an insurance perspective. The approach proposed here is designed to judiciously allocate controls in two stages: one to manage risk exposure, in terms of potential product loss, and the second to improve the effectiveness of the controls themselves. The method employed to evaluate this algorithm is based on three comparisons. One of these is presented in the first part of the paper and the other two in the second part. The test provided in this first part of the paper is performed on a simplified case study and compares the proposed heuristic algorithm (HA) to an optimised allocation (OA) method. The main objective of this paper is to present, in detail, a quality control planning method which allocates measurement resources with the aim of remaining below a threshold limit of risk exposure and of improving the effectiveness of the controls. The evaluation presented in the second part of the paper underscores the potential, as well as the limitations, of the proposed algorithm.
机译:本文的目的是从保险的角度提出一种用于质量控制计划的启发式算法。此处提出的方法旨在分两个阶段明智地分配控件:一个用于管理潜在产品损失方面的风险敞口,另一个用于提高控件本身的有效性。用于评估此算法的方法基于三个比较。本文的第一部分介绍了其中一个,第二部分介绍了另外两个。本文第一部分中提供的测试是在简化的案例研究中执行的,并将建议的启发式算法(HA)与优化分配(OA)方法进行了比较。本文的主要目的是详细介绍一种质量控制计划方法,该方法分配测量资源,以保持低于风险暴露的阈值极限并提高控制的有效性。本文第二部分提出的评估强调了该算法的潜力和局限性。

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