Application of dense nano-thin platinum films for low-temperature solid oxide fuel cells by atomic layer deposition

摘要

Nano-thin platinum (Pt) films with a dense microstructure for low-temperature solid oxide fuel cells (LT-SOFCs) were fabricated by atomic layer deposition (ALD) and were characterized in terms of their micro-structural properties and electrochemical performance. Pt thin films with a purity level of ～99% were achieved by controlling the O_2 pulsing time. The agglomeration behavior of the ALD Pt thin films was characterized by the annealing temperature, becoming extremely severe above 550 ℃. An LT-SOFC with a 25 nm thick dense ALD Pt cathode layer exhibited a peak power density of ～110 mW/cm~2 at 450 ℃.