Microindentation with a Vickers diamond pyramid was used in a study of mechanical properties of 6H-SiC with different concentrations of impurities (nitrogen and aluminium) and of intrinsic defects generated by irradiation or during growth under nonstoichiometric conditions. It was found that SiC crystals containing nonstoichiometric and radiation defects, as well as samples with high nitrogen concentration (Cn=10~20 cm~3), have a greater tendency for cracking, which results in deterioration of the microstrength characteristics.
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