Enhanced Characteristics of In_(0.5) Ga_(0.5)As Quantum Dot Infrared Photo Detector with Hydrogen Plasma Treatment

摘要

Device characteristics of In_(0.5)Ga_(0.5)As/GaAs quantum dot infrared detector (QDIP) have been enhanced with hydrogen plasma treatment. After the hydrogen (H) plasma treatment, the dark currents were noticeably decreased and photoluminescence (PL) intensity was increased by H-passivation of interfacial traps between quantum dots and GaAs and of non-radiative defect centers caused during QD growths. Photo response, which could not be observed in as-grown QDIP due to large dark currents which obscured the photocurrent signal, was measured successfully after H-treatment due to H-passivation.