Design of Highly Uniform Spool and Bar Horns for Ultrasonic Bonding

摘要

Although the groove and slot have been widely utilized for horn design to achieve high uniformity, their effects on uniformity have not been analyzed thoroughly. In this work, spool and bar horns for ultrasonic bonding are designed in a systematic way using the design of experiments (DOE) to achieve high amplitude uniformity of the horn. Three-dimensional modal analysis is conducted to predict the natural frequency, amplitude, and stress of the horns, and the DOE is employed to analyze the effects of the groove and slot on the amplitude uniformity. The design equations are formulated to determine the optimum dimensions of the groove and slot, and the uniformity is found to be influenced most significantly by the groove depth and slot width. Displacements of the spool and bar horns were measured using a laser Doppler vibrometer (LDV), and the predicted results are in good agreement with the experimental data.