Driving mechanism, design, fabrication process, and experiments of a cylindrical ultrasonic linear microactuator

摘要

A new type of cylindrical ultrasonic linear microactuator (CULMA) is introduced. The traveling wave generation condition in the stator is presented, which was confirmed using simulation and experimentation. The design and fabrication process to develop the stator is described. The stator was successfully fabricated using metallic glass and a sputtering method, and the vibration of the prototype matched the simulation results. When the driving frequency is at 626 kHz, the traveling wave in the stator was observed. Loaded with a pipe slider, the slider movement was experimentally demonstrated and the motion measured with 26 mm/s in peak speed. This paper presents a traveling wave generation method in a CULMA which would also available in other microactuators or MEMS-scale ones.