Neural Network Modeling of Reactive Ion Etching Using Optical Emission Spectroscopy Data

摘要

Neural networks are employed to model reactive ion etching (RIE) using optical emission spectroscopy (OES) data. While OES is an excellent tool for monitoring plasma emission intensity, a primary issue with its use is the large dimensionality of the spectroscopic data. To alleviate this concern, principal component analysis (PCA) and autoencoder neural networks (AENNs) are implemented as mechanisms for feature extraction to reduce the dimensionality of the OES data. OES data are generated from a 2{sup}4 factorial experiment designed to characterize RIE process variation during the etching of benzocyclobutene (BCB) in a SF{sub}6/O{sup}2 plasma, with controllable input factors consisting of the two gas flows, RF power, and chamber pressure. The OES data, consisting of 226 wavelengths sampled every 20 s, are compressed into five principal components using PCA and seven features using AENNs. Each method is subsequently used to establish multilayer perceptron neural networks trained using error back-propagation to model etch rate, uniformity, selectivity, and anisotropy. The neural network models of the etch responses using both methods show excellent agreement, with root-mean-squared errors as low as 0.215% between model predictions and measured data.