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首页> 外文期刊>IEEE Transactions on Semiconductor Manufacturing >A NMF-Based Image Restoration Scheme With Applications to LED Integrated Substrate Defect Detection
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A NMF-Based Image Restoration Scheme With Applications to LED Integrated Substrate Defect Detection

机译:基于NMF的图像恢复方案及其在LED集成基板缺陷检测中的应用

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To examine surface quality of light emitting diode (LED) substrates, human visual inspection is commonly used. However, manual inspection is not reliable because patterns of an integrated substrate are small and repeating. This paper describes a machine vision method for auto-detecting defects embedded on LED substrates. Image of arranged substrates is first grabbed. A global image restoration scheme based on non-negative matrix factorization (NMF) is used to reconstruct a non-negative matrix approximation (NMA) using a matrix of lower dimension and a weight matrix with non-negative elements. Repeating patterns of NMF output, i.e., NMA, can be considered similar to its input counterpart that defects have been excluded. Defects thus can be efficiently revealed by subtracting grabbed image from NMA. A procedure to determine proper basis space size of a specific image using pseudo singular value and a procedure to initialize a proper pair of factors using non-negative double singular value decomposition are also described. The proposed method is compared with methods of Lu and Tsai (2005), Lu and Tsai (2008), Perng and Chen (2010) and Chen and Perng (2011). Overall, results show that G-measure for proposed method under conditions of normal and various exceptions is higher than other available low-rank approximation methods.
机译:为了检查发光二极管(LED)基板的表面质量,通常使用肉眼检查。然而,由于集成基板的图案小且重复,因此手动检查不可靠。本文介绍了一种机器视觉方法,用于自动检测嵌入在LED基板上的缺陷。首先获取已布置基板的图像。基于非负矩阵分解(NMF)的全局图像恢复方案用于使用低维矩阵和具有非负元素的权重矩阵来重建非负矩阵近似(NMA)。可以认为NMF输出(即NMA)的重复模式与输入重复(缺陷已排除)相似。通过从NMA中减去抓取的图像,可以有效地揭示缺陷。还描述了使用伪奇异值确定特定图像的适当基础空间大小的过程以及使用非负双奇异值分解来初始化适当对因子的过程。将所提出的方法与Lu and Tsai(2005),Lu and Tsai(2008),Perng and Chen(2010)和Chen and Perng(2011)的方法进行了比较。总体而言,结果表明,在正常和各种例外情况下,该方法的G度量要高于其他可用的低秩近似方法。

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