This paper describes a micro-actuator for high-bandwidth tracking servo, where a micro-actuator is attached between slider and suspension, and moves the slider relative to the suspension. The micro-actuator frequency response measurement proved that this micro-actuator can be modeled as an ideal spring-mass-damper system up to 80 kHz, so that very high bandwidth servo system can be easily designed. The maximum servo bandwidth of 6.4 kHz was achieved in a drive level experiment, which is the highest bandwidth ever demonstrated as a drive level. A rapid step response time of 0.2 mS for 0.6 /spl mu/m step was also achieved. The experimental bandwidth was not limited by the micro-actuator's resonance mode, but the saturation of the micro-actuator driver.
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机译：本文介绍了一种用于高带宽跟踪伺服的微执行器，其中微执行器连接在滑块和悬架之间，并使滑块相对于悬架运动。微执行器的频率响应测量证明，该微执行器可以建模为高达80 kHz的理想弹簧-阻尼器系统，因此可以轻松设计非常高带宽的伺服系统。在驱动级实验中获得了6.4 kHz的最大伺服带宽，这是有史以来显示为驱动级的最高带宽。对于0.6 / spl mu / m的步长，也可以实现0.2 mS的快速步长响应时间。实验带宽不受微致动器的共振模式的限制，而是微致动器驱动器的饱和度。
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