Monolithic folded pendulum accelerometers for seismic monitoring and active isolation systems

摘要

A new class of very low noise low-frequency force-balance accelerometers is presented. The device has been designed for advanced mirror isolation systems of interferometric gravitational wave detectors. The accelerometer consists of a small monolithic folded pendulum with 2 s of natural period and an in-vacuum mechanical quality factor of 3000. The folded pendulum geometry, combined with the monolithic design, allows a unique 0.01% cross-axis residual coupling. Equipped with a high-resolution capacitance position sensor, it is capable of a noise-equivalent inertial displacement of 1-nm root mean square integrated over all the frequencies above 0.01 Hz. The main features of this new accelerometer are here reviewed. New possible applications of monolithic folded pendula in geophysical instrumentation are discussed.