An integrated device design environment for semiconductors

摘要

An integrated device design environment (IDDE) for semiconductor devices that is based on workstations and utilizes highly graphical and interactive input techniques has been developed. The framework of the system comprises a device editor, a mesh generator, and a graphical viewer which are interlinked by standard interface files. Into this has been installed a number of process (one-dimensional/two-dimensional) and device (two-dimensional/three-dimensional) simulators. The system has two major advantages. Firstly it effects, from a user perspective, a vast simplification of input to CAD tools without loss of generality and so may be effectively used in both development and research environments. This has been achieved via the use of graphical user interfaces utilizing WIMP and direct manipulation techniques which can produce input for any of the device simulators. Secondly, it facilitates transfer of results between modeling tools via standard interface files and so provides an open architecture which can be expanded without excessive effort. In addition, the software requires only a single workstation, making it economically attractive to small development groups.