Control of MEMS Vibration Modes With Pulsed Digital Oscillators—Part II: Simulation and Experimental Results

摘要

This paper extends our previous work on the selective excitation of mechanical vibration modes in MEMS devices using pulsed digital oscillators (PDOs). It begins by presenting extensive simulation results using the set of iterative maps that model the system and showing that it is possible to activate two or three spatial modes (resonances) of the mechanical structure with a PDO. The second part of this paper presents experimental results corroborating the theory and simulation results. It is shown that it is possible to separately excite vibration modes of the device by setting a few parameters of the PDO structure such as the sampling frequency and the sign of the feedback loop.