Integrated optical switches in silicon based on SiGe-waveguides

摘要

The realization of switches in silicon base on monomode Ge-indiffused SiGe waveguides is reported. At a wavelength of 1.3 mu m a Mach-Zehnder interferometer switch with a modulation depth of -10 dB at a current of 150 mA is obtained. This is the lowest value reported so far for single-mode optical switches in silicon.