Miniature temperature-insensitive Fabry-Pe/spl acute/rot fiber-optic pressure sensor

摘要

We present a miniature fiber-optic pressure sensor with a diameter of only 125 /spl mu/m. The sensor works as an extrinsic Fabry-Pe/spl acute/rot interferometer and the cavity length can be controlled with a resolution of about several nanometers. Also the sensor sensitivity can be easily adjusted by controlling the sensor gauge length. A passive temperature compensation scheme was used to reduce most of the sensor's temperature dependence. Since the sensor is composed entirely of fused silica, it is reliable, biocompatible, corrosion resistant, and immune to electromagnetic interference and has high-temperature capability.