Excimer laser technology development

摘要

Reviews the underlying physics and key technology developments ofnexcimer lasers. The paper traces both e-beam pumped lasers, which werenthe initial vehicle for demonstrating the majority of these systems, andnthe more practical fast-pulse avalanche-discharge lasers. By solving thenkey technology issues derived from certain applications of interest tonfunding agencies, the past work has provided the laser of choice for anynUV application requiring more than a few watts of output power. Thentechnology developed enables UV output powers in excess of 1 kW andnlifetimes of well over 109 shots