Excimer laser technology development

摘要

Reviews the underlying physics and key technology developments of excimer lasers. The paper traces both e-beam pumped lasers, which were the initial vehicle for demonstrating the majority of these systems, and the more practical fast-pulse avalanche-discharge lasers. By solving the key technology issues derived from certain applications of interest to funding agencies, the past work has provided the laser of choice for any UV application requiring more than a few watts of output power. The technology developed enables UV output powers in excess of 1 kW and lifetimes of well over 10/sup 9/ shots.