Deposition of Functional Plasma Polymer Films -Options for Low and Atmospheric Pressure Plasmas

摘要

For applications many materials are selected according to their beneficial bulk properties, while their surfaces often lack a specific functionality. Surface modifications are thus required; dry and resource-saving plasma processes represent an important technology for this purpose. In order to achieve a stable surface functionali-zation and to attain, as far as possible, independence of the used substrate material, the deposition of plasma polymer films gained high interest in industry. So far, mainly inorganic coatings are used in applications, while this article discusses options for polymer-like functional plasma polymer films that can be deposited both at low and atmospheric pressure plasma.