机译：半岛型结构的医疗用高灵敏度压阻式压力传感器
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Collaborative Innovation Center of Suzhou Nano Science and Technology, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an, China,School of Mechanical and Manufacturing Engineering, University of New South Wales, Sydney, NSW, Australia;
Shaanxi Institute of Metrology Science, Xi’an, China;
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Collaborative Innovation Center of Suzhou Nano Science and Technology, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an, China;
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Collaborative Innovation Center of Suzhou Nano Science and Technology, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an, China;
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Collaborative Innovation Center of Suzhou Nano Science and Technology, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an, China;
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Collaborative Innovation Center of Suzhou Nano Science and Technology, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an, China;
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Collaborative Innovation Center of Suzhou Nano Science and Technology, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an, China;
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Collaborative Innovation Center of Suzhou Nano Science and Technology, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an, China;
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Collaborative Innovation Center of Suzhou Nano Science and Technology, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an, China;
low pressure sensor; medical application; MEMS; peninsulaisland; ultra-high sensitivity;
机译：半岛型结构的医疗用高灵敏度压阻式压力传感器
机译：具有半岛岛结构的凸台膜片式压阻压力传感器，适用于超低压范围，具有高灵敏度
机译：基于不规则微驼峰结构的高灵敏度，耐磨压阻式压力传感器及其在人体运动传感中的应用
机译：使用分析模型的生物医学应用低压压阻NEMS传感器的设计和仿真
机译：α（6氢）-碳化硅作为高温应用的压阻压力传感器的特性和制造。
机译：低压条件下高灵敏度压阻式压力传感器的设计与应用
机译：低压条件下高灵敏度压阻式压力传感器的设计与应用
