Piezoresistive pressure sensor with high sensitivity for medical application using peninsula-island structure

著录项

• 来源
  《机械工程前沿：英文版》 |2017年第4期|P.546-553|共8页
• 作者

  Tingzhong XU12; Hongyan WANG3; Yong XIA1; Zhiming ZHAO1; Mimi HUANG1; Jiuhong WANG1; Libo ZHAO1; Yulong ZHAO1; Zhuangde JIANG1;

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• 作者单位

  [1]State Key Laboratory for Manufacmring Systems Engineering, Interna-tional Joint Laboratory for Micro/Nano Manufacturing and Measure-ment Technologies, Collaborative Innovation Center of Suzhou NanoScience and Technology, School of Mechanical Engineering, Xi＇an Jiaotong University, Xi＇an 710049, China;

  [2]School of Mechanical and Manufacturing Engineering, University ofNew South Wales, Sydney, NSW 2052, Australia;

  [3]Shaanxi Institute of Metrology Science, Xi＇an 710065, China;

  [1]State Key Laboratory for Manufacmring Systems Engineering, Interna-tional Joint Laboratory for Micro/Nano Manufacturing and Measure-ment Technologies, Collaborative Innovation Center of Suzhou NanoScience and Technology, School of Mechanical Engineering, Xi＇an Jiaotong University, Xi＇an 710049, China;

  [1]State Key Laboratory for Manufacmring Systems Engineering, Interna-tional Joint Laboratory for Micro/Nano Manufacturing and Measure-ment Technologies, Collaborative Innovation Center of Suzhou NanoScience and Technology, School of Mechanical Engineering, Xi＇an Jiaotong University, Xi＇an 710049, China;

  [1]State Key Laboratory for Manufacmring Systems Engineering, Interna-tional Joint Laboratory for Micro/Nano Manufacturing and Measure-ment Technologies, Collaborative Innovation Center of Suzhou NanoScience and Technology, School of Mechanical Engineering, Xi＇an Jiaotong University, Xi＇an 710049, China;

  [1]State Key Laboratory for Manufacmring Systems Engineering, Interna-tional Joint Laboratory for Micro/Nano Manufacturing and Measure-ment Technologies, Collaborative Innovation Center of Suzhou NanoScience and Technology, School of Mechanical Engineering, Xi＇an Jiaotong University, Xi＇an 710049, China;

  [1]State Key Laboratory for Manufacmring Systems Engineering, Interna-tional Joint Laboratory for Micro/Nano Manufacturing and Measure-ment Technologies, Collaborative Innovation Center of Suzhou NanoScience and Technology, School of Mechanical Engineering, Xi＇an Jiaotong University, Xi＇an 710049, China;

  [1]State Key Laboratory for Manufacmring Systems Engineering, Interna-tional Joint Laboratory for Micro/Nano Manufacturing and Measure-ment Technologies, Collaborative Innovation Center of Suzhou NanoScience and Technology, School of Mechanical Engineering, Xi＇an Jiaotong University, Xi＇an 710049, China;

  [1]State Key Laboratory for Manufacmring Systems Engineering, Interna-tional Joint Laboratory for Micro/Nano Manufacturing and Measure-ment Technologies, Collaborative Innovation Center of Suzhou NanoScience and Technology, School of Mechanical Engineering, Xi＇an Jiaotong University, Xi＇an 710049, China;

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• 原文格式 PDF
• 正文语种 CHI
• 中图分类 TP212;
• 关键词

  压力传感器; 医药设备; 敏感; 结构; 安装角度; 应用程序; 测试平台; 调查结果;

  机译：压力传感器;医药设备;敏感;结构;安装角度;应用程序;测试平台;调查结果;