Metrological aspects of piezoresistors arrangements on the membrane in miniaturized pressure sensors

摘要

A theoretical analysis concerning metrological features of thick film piezoresistors placed on circular edge-clamped membrane in pressure sensors is described. The change of resistance of a thick film piezoresistor, caused by the deflection of the membrane, related to the distance from the membrane centre and the width of the piezoresistor, is evaluated. Analytical expressions for different piezoresistors arrangements are presented and discussed.