MEMS devices have been available for almost 50 years. Pressure sensors, accelerometers, gyros, and displacement sensors have been popularly used as system components for a wide spectrum of applications in the automotive, aerospace, industrial, medical, and (most recently) consumer markets. However, only until recently has there been an epiphany in the MEMS community that has led to "thinking outside the MEMS chip" and considering all other elements/functionalities required to create an optimum systems solution.
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