Emission properties of Spindt-type cold cathodes with different emission cone material

摘要

Emission properties of thin film field emission array cathodes with molybdenum, hafnium, diamond-like carbon, and lanthanum hexaboride cones were investigated. Each array consisted of 681 holes and cones (microcells), spaced on 10- mu m centers on a silicon substrate. At work functions of more than 5 eV carbon cones had the lowest operating voltage-less than 50 V-due to the high value of the form factor of the cones, which have a sharp ribbed pyramidal shape. However, high current density was not achieved with such cathodes because of the low conductance of this type of diamond-like carbon. Different approaches to increase transconductance provided by one cell are discussed.