Physical Properties of Thin-Film Field Emission Cathodes with Molybdenum Cones.

摘要

Field emission cathodes fabricated using thin-film techniques and electron beam microlithography are described, together with effects obtained by varying the fabrication parameters. The emission originates from the tip of molybdenum cones that are about 1.5 micrometer tall with a tip radius around 500 angstrom. Such cathodes have been produced in closely packed arrays containing 100 and 5000 cones as well as singly.