TCAD Studies on the Determination of Diffusion Length for the Planar-Collector EBIC Configuration With Any Size of the Schottky Contact

摘要

In this brief, the transient single-contact electron-beam-induced current (SC-EBIC) and the conventional steady-state EBIC modes of the planar-collector configuration that were studied using a Technology Computer Aided Design device simulator are presented. The feasibility of these EBIC data in the extraction of the diffusion length of the planar-collector configuration with any values of surface recombination velocities and any size of the Schottky contact is also presented. The effect of the size of the Schottky contact on steady state and transient EBIC signals as well as the extracted diffusion length and linearization coefficient is discussed in this brief. The EBIC information obtained from the SC-EBIC and the conventional EBIC is found to be able to evaluate the diffusion length accurately regardless of the size of the Schottky contact.