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首页> 外文期刊>Electron Device Letters, IEEE >High-Mobility Solution-Processed Amorphous Indium Zinc $hbox{Oxide/In}_{2}hbox{O}_{3}$ Nanocrystal Hybrid Thin-Film Transistor
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High-Mobility Solution-Processed Amorphous Indium Zinc $hbox{Oxide/In}_{2}hbox{O}_{3}$ Nanocrystal Hybrid Thin-Film Transistor

机译:高迁移率溶液处理的非晶铟锌$ hbox {Oxide / In} _ {2} hbox {O} _ {3} $纳米晶体混合薄膜晶体管

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摘要

High-performance thin-film transistors with amorphous indium zinc oxide (IZO) films was deposited by embedding indium oxide nanocrystals ($hbox{In}_{2}hbox{O}_{3}$ NCs) into IZO films based on a sol–gel process. Excellent electrical properties have been demonstrated, including a field-effect mobility value of 32.6 $hbox{cm}^{2}cdot hbox{V}^{-1}cdot hbox{s}^{-1}$ and an on–off ratio of $hbox{10}^{7}$ , which were obtained at 1 mol% $hbox{In}_{2}hbox{O}_{3}$ NCs in amorphous IZO films. Our findings demonstrate the feasibility of low-temperature sol–gel-based oxide semiconductor transistors, which is more cost-effective compared with conventional fabrication techniques but with comparable performance.
机译:通过将氧化铟纳米晶体($ hbox {In} _ {2} hbox {O} _ {3} $ NCs)嵌入IZO膜中,沉积具有非晶铟锌氧化物(IZO)膜的高性能薄膜晶体管。溶胶-凝胶过程。出色的电性能已得到证明,包括32.6 $ hbox {cm} ^ {2} cdot hbox {V} ^ {-1} cdot hbox {s} ^ {-1} $的场效应迁移率值和$ hbox {10} ^ {7} $的偏离比率,这是在非晶IZO薄膜中以1 mol%$ hbox {In} _ {2} hbox {O} _ {3} $ NCs获得的。我们的发现证明了低温基于溶胶-凝胶的氧化物半导体晶体管的可行性,与传统的制造技术相比,该晶体管更具成本效益,但性能却相当。

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