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首页> 外文期刊>Acta Materialia >EDGE EFFECTS IN THIN FILM DELAMINATION
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EDGE EFFECTS IN THIN FILM DELAMINATION

机译:薄膜分层中的边缘效应

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Thin films bonded to a substrate often sustain large in-plane residual stresses that are transferred to the film via shear stresses on the interface near their edges. These edge zones play a significant role in film delamination. A new method is introduced to analyze both the residual stress distribution in a film near its edge and the energy release rate and mode mix for an interface delamination crack emerging from, or converging upon, an edge. Two two-dimensional configurations are considered: (a) a film whose edge lies in the interior of the substrate and (b) a film whose edge is aligned with the edge of the substrate (i.e. the film/substrate geometry is a quarter-plane). There are significant differences between the two cases. For the former, (a), the energy release rate approaches the steady-state, limiting rate for a long interface crack when the crack has extended less than one film thickness. By contrast, the energy release rate in case (b) remains far below the steady-state rate until the crack extends to ten or more film thicknesses from the edge. In case (b), the edge effect provides a significant protection against edge delamination, whereas in case (a) it does not Elastic mismatch between the film and the substrate is significant in case (b), but not in case (a). A second set of behaviors is investigated wherein the interface crack approaches the edge of the film from the interior. For both types of edges, the energy release rate drops well below the steady-state rate at remaining ligament lengths that are very large compared to the film thickness, approaching zero as the de1amination converges on the edge. Analytic features which account for the various behaviors will be highlighted, and practical implications for thin film delamination will be discussed.
机译:粘结到基板上的薄膜通常会承受较大的面内残余应力,该残余应力会通过靠近其边缘的界面上的剪应力传递到薄膜上。这些边缘区域在薄膜分层中起重要作用。引入了一种新方法来分析膜在其边缘附近的残余应力分布以及从边缘出现或会聚在边缘上的界面分层裂纹的能量释放速率和模式混合。考虑了两个二维配置:(a)边缘位于基材内部的薄膜,以及(b)边缘与基材边缘对齐的薄膜(即,薄膜/基材的几何形状为四分之一平面)。两种情况之间存在显着差异。对于前者,(a),当裂纹扩展到小于一个膜厚时,能量释放速率接近稳态,限制了长界面裂纹的释放速率。相比之下,情况(b)中的能量释放速率保持远低于稳态速率,直到裂纹从边缘扩展到十个或更多的膜厚度为止。在情况(b)中,边缘效应提供了针对边缘脱层的显着保护,而在情况(a)中,边缘效应并未对膜和基材之间的弹性失配在情况(b)中显着,但在情况(a)中不明显。研究第二组行为,其中界面裂纹从内部接近薄膜的边缘。对于这两种类型的边缘,在与膜厚度相比非常大的剩余韧带长度处,能量释放速率均远低于稳态速率,随着脱氨作用在边缘上的收敛,能量释放速率接近零。将重点说明解释各种行为的分析功能,并讨论对薄膜分层的实际意义。

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