Design parameters analysis and verification of angular vibration sensor based on magnetohydrodynamics

摘要

The angular vibration is concerned in many fields such as satellite platform, manufacturing equipment for micro-electromechanical systems. However, the angular vibration with a frequency more than 15 Hz is difficult to be measured by traditional gyroscopes. The angular vibration sensor based on Magnetohydrodynamics can meet the requirements of both wide bandwidth and higher precision. In order to optimize the structure, a response of conducting fluid in the static magnetic field to the angular vibration is modeled in this paper. Based on this model, the sensitivity of the design parameters of magnetic field intensity, conducting fluids’ height and width are analyzed to get an optimized parameter for higher precision and bandwidth. A prototype was developed to verify the analysis and optimization. The experiment results showed that the model is accurate with 6.7% error in lower-cut-off frequency and 1.4% error in scale factor. It can meet the design requirement of 6–1000 Hz.