...
首页> 外文期刊>RSC Advances >Thinning of n-layer MoS2 by annealing a palladium film under vacuum
【24h】

Thinning of n-layer MoS2 by annealing a palladium film under vacuum

机译:通过在真空下退火钯膜来减薄N层MOS2

获取原文
   

获取外文期刊封面封底 >>

       

摘要

When Pd is thermally evaporated onto n -layer MoS _(2) , a uniform film is formed on the surface. If Pd/ n -layer MoS _(2) is annealed at high temperature under vacuum, thinning of n -layer MoS _(2) is observed. By controlling the thickness of the Pd film and annealing temperature, one or two top layers of n -layer MoS _(2) can be removed during the annealing process. The thinning method presented in this work benefits the future design and fabrication of MoS _(2) -based devices.
机译:当Pd热蒸发到N-Layer MOS _(2)上时,在表面上形成均匀的膜。如果在真空下在高温下退火PD / N -Layer MOS _(2),则观察到N -Layer MOS _(2)的变薄。通过控制Pd膜和退火温度的厚度,可以在退火过程中除去一个或两个顶层的N-层MO_(2)。本工作中提出的稀释方法有利于未来的设计和制造MOS _(2)的设备。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号