Demands for MEMS are continuously growing and it is predicted that they will continue to grow for a few more decades with the value of products rising to $40 billion in 2015 and $200 billion in 2025. In this study, we first discuss the main distinct advantages of MEMS as well as the important differences between MEMS and IC, then some latest research progresses on biomedical, optical and automotive applications of MEMS are reviewed. Finally, possible future developments of MEMS are prospected.
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