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An Analytical Theory of Piezoresistive Effects in Hall Plates with Large Contacts

机译:大触点霍尔板压电效应的分析理论

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Four-terminal transducers can be used to measure the magnetic field via the Hall effect or the mechanical stress via the piezoresistance effect. Both effects are described by an anisotropic conductivity tensor with small offdiagonal elements. This has led other authors to the conclusion that there is some kind of analogy. In both cases the output voltage depends on the geometry of the device and the size of the contacts. For Hall plates this influence is accounted for by the Hall-geometry factor. The alleged analogy proposes that the Hall-geometry factor also applies to four-terminal stress transducers. This paper shows that the analogy holds only for a limited class of devices. Moreover, it is shown that devices of different geometries may have identical magnetic field sensitivity but different mechanical stress sensitivities. Thus, shape optimization makes sense for mechanical stress sensors. In extreme cases the output voltages of vertical Hall-effect devices may have notable magnetic field sensitivity but zero mechanical stress sensitivity. As byproduct, exact analytical formulae for the equivalent resistor circuit of rectangular and circular devices with two perpendicular mirror symmetries are given. They allow for an accurate description of how mechanical stress and deformation affect the output offset voltage and the magnetic sensitivity of Hall-effect devices.
机译:四端子换能器可用于通过霍尔效应或通过压阻效应测量磁场或机械应力。这两种效果都是通过具有小型偏差元件的各向异性电导率张量来描述。这导致了其他作者结束了一些比喻。在这两种情况下,输出电压取决于设备的几何形状和触点的大小。对于霍尔板块,这种影响因霍尔几何因素而受到占据。所谓的类比提出了大厅 - 几何因素也适用于四端子应力传感器。本文表明,类比仅适用于有限类设备。此外,示出了不同几何形状的装置可以具有相同的磁场灵敏度,而是不同的机械应力敏感性。因此,形状优化对机械应力传感器有意义。在极端情况下,垂直霍尔效应装置的输出电压可能具有显着的磁场灵敏度,但零机械应力灵敏度。作为副产品,给出了具有两个垂直镜对称的矩形和圆形装置的等效电阻电路的精确分析公式。它们允许准确描述机械应力和变形如何影响输出偏移电压和霍尔效应装置的磁敏度。

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