Investigations on Impact of Post-heat Temperature on Structural, Optical and Electrical Properties of Al-doped ZnO Thin Films Prepared by Sol-gel Method

摘要

Aluminum doped ZnO (AZO) thin films have been prepared by spin coating route on glass substrate. The structural, optical and electrical thin films have been characterized in different post-heat temperatures between 45° and 600°C. Xray diffraction analysis has revealed hexagonal wurtzite structure with (002) preferred orientation which increased in crystallite size by increasing post-heat temperature. The optical spectra of the films showed the transmittance higher than 90% within the visible wavelength region. Our results show that optical gap and surface resistance of the films are decreased by increasing post-heat temperature.