Characterizing coupled MEMS resonators with an electrical resonator

摘要

RapiddevelopmentinmicroanofabricationhasenabledtheshrinkingofMEMSdevicesandtheabilitytofabricatetheminlargearrays.However,processvariationsanddevicemismatchhavealsoraisedtestabilityissuesintheMEMSindustry.MEMSresonatorshavebeencoupledtosimplifythecharacterizationofthefabricationprocessanddeviceperformanceusingtheircollectivebehaviour.Perturbationanalysisusingeigenvaluescanthereforebeappliedtoextractthesystemmatrixofcoupledresonators.WeproposeanewwayofperturbationanalysisbycouplinganelectricalresonatortoanarrayofMEMSresonators.Theelectricalresonatorissimpleinstructureandeasytoreadout.Itcanalsopreciselycontroltheamountofperturbationbasedontwoavailabletechniques.CouplingbetweenMEMSresonatorsandelectricalresonatoropensanewwindowforprocesscharacterization,devicetesting,materialcharacterization,aswellaslargesensorsarrayactuation...