Fabrication of Replica Mold by Room Temperature Nanoimprinting using Organic Spin-on-glass

摘要

Nanoimprintlithography（NIL）can transfbrthenano－PattemS Onthe master moldinto nanOimpnntresin by physical contact．［1－3］It can be usede飴ctively to fabricate nan0－PattemS With simplePrOCeSSandlowcostandisthereforeconsideredtobeOne Of the most promising next－generationnano－PattemlngteClmologleS．