Currently available high speed scanning systems based on galvo mirrors are equipped with ob- jectives with small numerical apertures (NA < 0.2) which are not sufficient for most of the in- volume micro structuring processes. Whereas high precision air bearing translation stages are used with microscope objectives the speed is limited to approximately 100 mm/s. In order to overcome these limitations we integrated a galvo scanner into a system with large maximum scanning velocity (50 - 400 mm/s), large numerical aperture (NA = 0.4-1.2), small focus size (0.6 - 2.2 |ìm), high pre- cision (100 - 400 nm) and computer controlled pre-compensation of spherical aberrations for in- volume focusing. Furthermore, we combined the scanning system with a computer controlled three axis translation stage to process large flat work pieces such as wafers up to 2 mm in thickness. As application of the scanner high speed direct writing of waveguides, markings, nano structures inside transparent materials as well as the high speed fabrication of 3D micro structures by in-volume se- lective laser etching are demonstrated.
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机译：当前可用的基于振镜的高速扫描系统配备了具有较小数值孔径（NA <0.2）的物体，这对于大多数批量微结构化工艺来说是不够的。显微镜物镜使用高精度空气轴承平移台，速度限制在大约100 mm / s。为了克服这些限制，我们将振镜扫描仪集成到一个系统中，该系统具有较大的最大扫描速度（50-400 mm / s），较大的数值孔径（NA = 0.4-1.2），较小的焦距（0.6-2.2 |ìm），高精度（100-400 nm）和计算机控制的球差的预补偿，可进行体积内聚焦。此外，我们将扫描系统与计算机控制的三轴平移台相结合，以处理大型扁平工件，例如厚度最大为2 mm的晶圆。作为扫描仪的应用，展示了波导的直接直接写入，透明材料内部的标记，纳米结构以及通过批量选择激光蚀刻进行的3D微观结构的高速制造。
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