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HIGH NUMERICAL APERTURE OPTOMECHANICAL SCANNER FOR LAYERED GRADIENT INDEX MICROLENSES, METHODS, AND APPLICATIONS
HIGH NUMERICAL APERTURE OPTOMECHANICAL SCANNER FOR LAYERED GRADIENT INDEX MICROLENSES, METHODS, AND APPLICATIONS
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机译:层状梯度指数微透镜的高数值孔径光机扫描仪,方法和应用
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摘要
A high numerical aperture opto-mechanical scanner for writing refractive index modifications includes a fast axis scanner having a fast scanning axis. A waveform generator is electrically coupled to the fast axis scanner, and a waveform is provided by the waveform generator which defines a fast scan of the fast axis scanner. A scanning lens assembly is mechanically coupled to the fast axis scanner, the scanning lens assembly having a NA greater than 0.5 and a scanning lens motion along the fast scanning axis. A femtosecond laser is optically coupled through the scanning lens assembly to a surface of a material, creating a femtosecond laser light scanning pattern to write the refractive index modifications into the material. A method for writing refractive index modifications using a high numerical aperture opto-mechanical scanner is also described.
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