A simple interferometric method to measure the calibration factor and displacement amplification in piezoelectric flextensional actuators

摘要

Laser interferometry is a well-established technique for the characterization of piezoelectric actuators. In this work, by using a low cost Michelson interferometer, the measurement of the calibration factor and the displacement amplification of a novel piezoelectric flextensional actuator (PFA), designed by using the topology optimization method, is performed. A simple method, based on small phase modulation depth when the PFA is driven by a triangular waveform, allows the absolute interferometer calibration. The free-displacement of the PFA for various drive voltages is measured and the displacement amplification is determined. The linearity and frequencyresponse of the PFA are evaluated up to 20 kHz.