Preparation and characterization of zinc sulfide thin film deposited on quartz substrate from sintered targets by electron beam evaporation

摘要

Zincsulfidethinfilmsweredepositedonquartzsubstratefromsinteringtargetsbyelectronbeamevaporation.Thestructural,morphologicalandopticalpropertiesofthefilmswereinvestigatedbyX-raydiffraction(XRD),scanningelectronmicroscopy(SEM),photoluminescenceandUV-visspectra.XRDanalysisindicatedthatpreparedZnSthinfilmshowedhexagonalpolycrystallinewurtzitestructurewith(110)preferentialdirection.Thestructureoffilmshastheaccordancewithsinteredtargetsbyelectronbeamevaporation.SEMimagesrevealedthefilmswereconstitutedofnanoparticleswithdiameterofseveraldozensofnanometersorevensmaller,whichhasbeenvertifiedbycalculatedresultofgrainsize.Thephotoluminescencespectrashowedtheemissionpeakwaslocatedat370nmwithexcitationwavelengthof250nm,whichmaybecausedbydonor-acceptorbandtransition.Fromthetransmissionspectra,thethicknessandopticalbandgaphavebeencalculatedandfitted,andtheresultindicatedthefilmhasbroaderopticalbandgap,about3.75eV.