Two-photon polymerization technique with sub-50 nm resolution by sub-10 fs laser pulses

摘要

Nanofabrication of structures with a feature size of sub-50 nm with ultrashort-laser based two-photon polymerization (2PP) technique is presented. The spatial resolution of the 2PP structures depends on the characteristics of the polymer material and the laser system used for fabrication. Here we compare the successful creation of sub-100 nm structures with two different few-cycle laser systems and chemically modified zirconium-based sol-gel composite material using cross-linker for resolution enhancement.