Ar+ ion milling rib waveguides on nonlinear optical (Yb,Nb):RTP/RTP epitaxial layers

摘要

In this paper we present the fabrication and characterization of rib waveguides made on (Yb,Nb):RbTiOPO4/RbTiOPO4 epitaxial layers. Liquid phase epitaxy (LPE) was used to grow planar thin films followed by Ar+ ion milling for surface rib fabrication. Here, we report the detailed fabrication procedure and characterization of the ribs. The study reveals good optical confinement and that type II second harmonic generation inside the rib was obtained, showing the generation of green light at 570 nm.