Shadow Inspection of 3D Objects in Partially Coherent Light

摘要

Shadow Inspection of 3D Objects in Partially Coherent LightThe peculiarities of 3D object image formation in a diffraction-limited system using quasi-monochromatic source with finite angular size are investigated. Algorithms for considerable increase in the accuracy of inspection of 3D objects by shadow optical method are proposed. These algorithms are based on high precision analytical determination of shift of shadow boundary image of thick object and on introduction of corrections depending on the object thickness and the optical system parameters. The theoretical results obtained have been experimentally verified.