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3D Image Formation in Transmitted Partially Coherent and Incoherent Light Applied to Dimensional Inspection

机译:透射的部分相干和非相干光中的3D图像形成应用于尺寸检查

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摘要

The peculiarities of 3D objects image formation with clear shadow projection based on the constructive theory of 3D objects formation under illumination by partially coherent and perfectly incoherent light are investigated. Threshold algorithms for determining the position of boundaries of geometric 3D objects are developed, algorithms taking into account object thickness, light source angular sizes, and projection system angular apertures. These algorithms are based on the application of a true (calculated) threshold or a standard one using the corrective component for thresholds. Cases of weak and strong 3D object volumetricity for partially coherent and incoherent illumination are studied. The analytical equations for these algorithms are given. It is shown that the use of algorithms can significantly improve the measurement accuracy of the extended objects.
机译:基于部分相干和完全不相干的光在照明下形成3D对象的构造理论,研究了具有清晰阴影投影的3D对象图像形成的特点。开发了用于确定几何3D对象边界位置的阈值算法,该算法考虑了对象厚度,光源角度大小和投影系统角度孔径。这些算法基于真实(计算)的阈值或使用阈值校正分量的标准算法的应用。研究了部分相干和不相干照明的弱3D对象体积和强3D对象体积的情况。给出了这些算法的解析方程。结果表明,使用算法可以大大提高扩展对象的测量精度。

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    Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS) 41 Russkaya str., Novosibirsk 630058, Russia,Novosibirsk State University 2 Pirogova Street, Novosibirsk 630090, Russia,Novosibirsk State Technical University 20 K. Marksa Prospekt, Novosibirsk 630073, Russia;

    Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS) 41 Russkaya str., Novosibirsk 630058, Russia;

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  • 正文语种 eng
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  • 关键词

    3D diffraction; shadow method; dimensional inspection; partially coherent light; perfectly incoherent light;

    机译:3D衍射;阴影法尺寸检查;部分相干的光;完全不相干的光;

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