Wire bonder is a typical high speed machine. The motion speed of XY-stage is the key factor of bonding efficiency. However, phase lag elements in the servo system limit the bandwidth and slow down the system’s response. A predictive velocity observer is proposed to compensate for those phase lags. Then, the velocity loop controller can be designed as for a servo system which does not have those phase lags. Loop gains are enlarged and bandwidth is enlarged correspondingly. Then, the motion speed is improved and settling time is decreased. Experiment results verify that the predictive velocity observer provided a significant phase lead and the performance of wire bonder is improved.
展开▼
