Thermodynamics modeling of gas phase processes in polycrystalline diamond deposition duringthermal plasma chemical vapor deposition

R. Jamshidi; M. S. Yaghmaee; A. Sarani; S. I. Hosseini; Y. Ahmadizadeh; B. Shokri

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Thermodynamics modeling of gas phase processes in polycrystalline diamond deposition duringthermal plasma chemical vapor deposition

机译：热等离子体化学气相沉积过程中多晶金刚石沉积中气相过程的热力学建模

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《Advanced Studies in Theoretical Physics》 |2012年第8期|共15页
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R. Jamshidi; M. S. Yaghmaee; A. Sarani; S. I. Hosseini; Y. Ahmadizadeh; B. Shokri;
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2. GaN epitaxial films grown by hydride vapor phase epitaxy on polycrystalline chemical vapor deposition diamond substrates using surface nanostructuring with TiN or anodic Al oxide [J] . A. Y. Polyakov, rnA. V. Markov, rnM. P. Duhnovsky, Journal of Vacuum Science & Technology . 2010,第5期

机译：使用TiN或阳极氧化铝表面纳米结构在多晶化学气相沉积金刚石基板上通过氢化物气相外延生长的GaN外延膜
3. Field emission of polycrystalline diamond films grown by microwave plasma chemical vapor deposition. II. Effect of p-type doping in diamond [J] . Masatsugu Itahashi, Yasunobu Umehara, Yasuo Koide Diamond and Related Materials . 2001,第12期

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4. Plasma assisted chemical vapor deposition of diamond and applications: from large-grain polycrystalline diamond to nanocrystalline diamond [C] . Yonhua Tzeng IEEE International Conference on Plasma Science . 2004

机译：金刚石和应用的等离子体辅助化学气相沉积：从大谷物多晶金刚石到纳米晶金刚石
5. Chemical kinetic calculations of the gas phase in atmospheric pressure microwave plasma-assisted chemical vapor deposition of diamond. [D] . Bastani-Parizi, Hamideh. 1993

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7. Growth of Si-Doped Polycrystalline Diamond Films on AlN Substrates by Microwave Plasma Chemical Vapor Deposition [O] . V.S. Sedov, A.A. Khomich, V.G. Ralchenko, 2015

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Thermodynamics modeling of gas phase processes in polycrystalline diamond deposition duringthermal plasma chemical vapor deposition

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