Theoretical analysis of surface acoustic wave propagating properties of Y-cut nano lithium niobate film on silicon dioxide

摘要

The surface acoustic wave (SAW) propagating characteristics of Y-cut nano LiNbO3 (LN) film on SiO2/LN substrate have been theoretically calculated. The simulated results showed a shear horizontal (SH) SAW with enhanced electromechanical coupling factor K 2 owing to a dimensional effect of the nanoscale LN film. However, a Rayleigh SAW and two other resonances related to thickness vibrations caused spurious responses for wideband SAW devices. These spurious waves could be fully suppressed by properly controlling structural parameters including the electrode layer height, thickness, and the Euler angle (θ) of the LN thin film. Finally, a pure SH SAW was obtained with a wide θ range, from 0° to 5° and 165° to 180°. The largest K 2 achieved for the pure SH SAW was about 35.1%. The calculated results demonstrate the promising application of nano LN film to the realization of ultra-wideband SAW devices.