Influence of the temporal variations of plasma composition on the cyclic formation of dust in hexamethyldisiloxane-argon radiofrequency discharges: Analysis by time-resolved mass spectrometry

摘要

Cyclic formation of dust nanoparticles in hexamethyldisiloxane (HMDSO, Si₂O(CH₃)₆)-argon RF discharge with pulsed injection of HMDSO was studied using time-resolved mass spectrometry (MS) and optical emission spectroscopy (OES). A large amount of C₂H₂, considered as promoter of dust nucleation in hydrocarbon plasmas, was found as a by-product of HMDSO fragmentation. Although no negative ions were detected the presence of C₂H₂ in the HMDSO-Ar discharge supports the hypothesis of a dust growth mechanism based on negative ions being trapped in the plasma. It was found that at the beginning of each cycle of dust formation during α – γ ′ transition, the discharge sustaining process is accompanied by a strong consumption of the HMDSO main by-products: HMDSO-15, CH₄ and C₂H₂. At the end of the cycle, corresponding to the progressive disappearance of dust, the discharge switches back to its initial conditions. The beginning of the inverse transition, i.e. γ ′ – α , is most likely correlated to the growing void in the dust cloud and dust disappearance. In presence of dust nanoparticles, Ar+ and ArH+ dominate the ion population and consequently the discharge maintenance. When the dust particles gradually disappear, the discharge is rather controlled by Si₂O(CH₃)₅+ ions. Moreover, the increased amount of such heavy ions reveals clearly their important income in the dust repelling process due to the drag force on the large sized dust even at short time scale during the injection time of HMDSO. Atomic-H production increases during the transition from dusty plasma to HMDSO-rich plasma with no dust and its role is associated to a delay in the dust nucleation stage.